Light-weighted structure on back of mirror

  • Light-weighted mirror
    • Size: 100 mm Φ
    • Material: Silicon Carbide
    • Surface form: Plano
  • The Goal
    • Correct figure error that is a result of print-through from conventional polishing
  • The Configuration
    • Q-flex 100
      • Raster Polishing
    • 150 mm wheel
      • Large spot to minimize cycle time
    • D10 fluid
      • Achieves best roughness on Silicon Carbide