You can't make what you can't measure!

  • ASI(Q) is used to make a stitched measurement of the flats
  • 12 measurements are made and are stitched together
  • Through stitching we are able to calculate and remove reference wave error from the TF and interferometer
    • In this case an additional random average calibration was made to remove high frequency errors
    • This method provides an accurate measurement of irregularity

 

featuredcasestudy superflatflats fig2

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Download a PDF of the the full Case Study, "Polishing Super Flat Flats".