MRF Figure Correction Results

  • PV improved from λ/4 to λ/75!
  • 100x RMS improvement!
    • Final RMS of 1.1nm was achieved
    • Rotational polishing was chosen to efficiently correct mostly rotationally symmetric errors
    • All corrections were made with QED’s smallest (20mm) polishing wheel to achieve the best performance near the edge of the part and for correcting MSF errors
    • D11 fluid, our highest removal rate fluid, minimizes run time

featuredcasestudy superflatflats fig6 rev2


  • Piston and tilt removed
  • 3x3 median filter applied
  • Plots on same scale




Download a PDF of the the full Case Study, "Polishing Super Flat Flats".