Surface Roughness Improvement


Average RMS of three measurements
improved from 2.4Å to 1.9Å after MRF with D11


featuredcasestudy superflatflats fig5



  • Zygo NewView WLI used to measure roughness
  • 20x Magnification
  • Plane aberrations removed
  • 80µm – 2.5µm Band pass filter applied as per ISO10110-8 roughness spec
  • Spikes removed



Download a PDF of the the full Case Study, "Polishing Super Flat Flats".