Conclusions

 

  • λ/75 PV was reached after just 2 runs and 3 hours of polishing!

  • D11 fluid improved the surface roughness to 1.9Å RMS

  • Using only D11 fluid provided a fast cycle time
    • Only 3 hours of polishing needed

  • Careful metrology is required to reach a target of λ/75 PV
    • Stitching with ASI(Q) removes reference wave error and provides the most accurate measurement of irregularity
    • Three flat test on horizontal interferometer provides an absolute measurement of power
    • QED.NET analysis tools can be used to merge data quickly and easily.
      (For more information about QED.NET analysis tools visit https://qedmrf.com/en/mrfpolishing/mrf-applications/using-qed-analysis-notebooks)

 

Download a PDF of the the full Case Study, "Polishing Super Flat Flats".