RMS irregularity improvement using MRF

  •  Irregularity specification: < 55 nm RMSBefore MRF average irregularity:
  • 100 nm RMS
  • After MRF average irregularity: 15 nm RMS
  • An average of ~7x RMS improvement is seen on this batch after 1 MRF iteration!

 

asphere production case study pict10a 

             asphere production case study pict10b